利用射频等离子体增强化学气相沉积技术,以CH4为气源,在单晶锗基底上制备了具有红外增透效果的薄膜。Raman光谱分析表明,D峰和G峰分别位于1200～1450 cm^-1和1500～1700 cm^-1之间,说明薄膜具有典型的类金刚石的特征峰,可知镀制的薄膜是类金刚石膜。通过研究射频功率对类金刚石膜红外透过率以及硬度等性能的影响,分析了类金刚石膜的红外透过率和纳米硬度随着薄膜中sp3含量的增加而增大的原因,从而找出一种利用PECVD方法制备DLC膜的最佳工艺参数。

The infrared antiflection film is produced on the germanium substrates with CH4 as source gas by RF-PECVD process. The Raman spectrum results figure out that the coating has the characteristic peaks of DLC in which the D peaks between 1200 cm-1 and 1450 cm-1 while G peaks between 1500 cm-1 and 1700 cm-1, thus DLC films is successfully obtained. In order to obtain the better processing conditions, the effect of RF power to the infrared transmittance and hardness is researched. Meanwhile, the reason why the higher sp3 concentration, the higher infrared transmittance and the harder film is analyzed.

随着现代军事空间技术的快速发展，对红外探测器的要求越来越高。同时，对红外光学元件的要求也越来越苛刻。主要研究了硫化锌(ZnS)基底表面减反与保护膜的制备技术，采用介质膜与硬膜复合方法，通过对不同材料的对比分析，最终选取碳化锗(Ge1-xCx)材料作为介质膜与DLC类金刚石保护膜的过渡层。利用电子束与离子源辅助沉积技术制备介质膜；磁控溅射技术制备过渡层碳化锗；化学气相沉积技术制备DLC类金刚石保护膜，解决了介质膜与类金刚石保护膜应力匹配的问题，并通过对多种沉积工艺的整合，得到了一套稳定的工艺制备流程。最终在硫化锌基底上制备出的减反射与保护膜平均透过率达到92%，硬度符合要求。

With the rapid development of modern military space technology, the requirement of infrared detector is increasing, the requirement of infrared optical element will stricter at the same time. The preparation of anti-reflection and protective film on the substrate of ZnS were mainly studied. The coating method of dielectric and hard film were combined, through the comparative analysis of different materials, finally, the carbide germanium (Ge1-xCx) as transition layer which between media film and DLC would be selectted. Using electron beam and ion source assisted deposition technology to manufacture the dielectric film, and using magnetron sputtering technology to manufacture the transition layer, at the end of process the DLC will be prepared by chemical vapor deposition technique. The problems of stress matching, and integrate different sedimentary processes were solved, meanwhile a stable process preparation process was got. Finally, the anti-reflection and protective film

类金刚石膜因其高的硬度、高的介电性、低的摩擦系数、优异的光学和化学性能以及巨大的潜在应用前景而成为研究热点。采用离子增加化学气相沉积方法在Si基底表面制备含氢类金刚石薄膜,通过XPS能谱测试,确定膜层的成份组成,膜层中除了含有碳以外还含少量的吸附的氧。调节反应源气体中H2的比例,结果表明H2的含量直接影响DLC薄膜的性能。随着H2的含量增大,膜层的表面粗糙度降低,膜层的硬度变大,而应力相应增大。这是由于反应源气体中H2含量的增加,DLC薄膜中氢的含量反而降低,膜层内sp2团簇结构的无序性增加,sp3键的比例增加,这将使得膜层内的碳的空间网络结构所占的比例增加。

Diamond-like carbon (DLC) films have been largely studied due to their properties of high mechanical hard-ness,high electrical resistivity,low friction coefficient,optical transparency and chemical inertness and their high poten-tial in many industrial applications. DLC films were deposited in an RF parallel plate plasma reactor using various val-ues of process pressure and gas mixture. The films were analyzed by X-ray photoelectron spectroscopy(XPS). By changing the content of H2 to dilute C4H10 and increase the percentage of H2 in the reacting source gas,to a certain ex-tent, the hardness and stress of the prepared DLC films have been increased, while surface roughness of the films have been decreased. And values for the content of sp3 bonded carbon has been increased.

目的分析两种类金刚石碳(DLC)涂层的成分和结构差异,研究涂层本质特征在发动机减摩降耗方面的应用。方法测试分析涂层成分和表面形貌,讨论在活塞销表面沉积DLC涂层对零件材料组织和硬度的影响,验证活塞销沉积DLC涂层后对发动机机械损失功率的影响,并运用转移膜和石墨化两种摩擦机制进行分析讨论。结果标杆试样的涂层较厚,为W掺杂的DLC涂层,且其致密度、均匀性及膜/基结合状态均优于在研涂层技术;成品活塞销沉积DLC涂层后,当转速介于2200~4000 r/min范围内时,涂层表现出提高发动机动力性的作用。结论 DLC涂层应用可有效改善活塞销的表面状态,减缓零件工作条件下的磨损,延长活塞销的使用寿命。

Objective To analyze the diversity of the composition and structure of the two kinds diamond-like carbon (DLC) film and study its application of anti-friction in the engine. Methods The composition and surface morphology of the film were ana-lyzed, the effect of DLC film on the surface of piston pin on the components organization material and hardness was discussed, the influence of the application of the DLC film on piston pin on engine mechanical loss power was verified, tribological mechanism of membrane and graphitization were analyzed and discussed. Results Benchmark coating was W-doped DLC films and was thicker. Benchmark coating specimens were better than the research coating technology in the phase density, uniformity and the bonding state. After the application of finished piston pin on DLC coating,it showed that the power performance of engine had been im-proved when the speed between the ranges of 2200 ~ 4000 r/ min. Conclusion Application of DLC film can effectively improve

利用阳极离子束技术在SKD11型不锈钢和YG6硬质合金上沉积类金刚石( DLC)薄膜,采用扫描电子显微镜、原子力显微镜、Raman光谱分析薄膜微观结构和表面形貌；采用WS-2005型附着力划痕仪和洛氏压力机测试膜基结合强度；采用球磨仪测试膜层耐磨性能。结果表明：利用该技术所制DLC膜是一种非晶结构、表面平整的薄膜,粗糙度Ra 值仅为5.21nm。DLC/Cr/SKD11膜系Raman光谱ID/IG值(0.69)高于DLC/Cr/YG6膜系(1.54),说明SKD11高于YG6所制膜层的sp3C键含量；DLC/Cr/SKD11膜系结合强度(17.8 N)低于DLC/Cr/YG6膜系(39.2 N),且DLC/Cr/YG6膜系的洛氏压痕周围仅有放射状微细裂纹,而DLC/Cr/SKD11膜系的压痕周围存在膜层脱落现象；沉积在SKD11与YG6基体上DLC膜的单位磨损率分别为1.40E-4和8.81E-5,说明YG6基体上DLC膜层的耐磨性要优于SKD11基体上的DLC膜层。由此看出,不同基体上制备的DLC膜层微观结构不同,导致结合性能及耐磨性能不同。

Diamond like carbon films were deposited by the anode ion beam technique on stainless steel (SKD11) and a hard al-loy of W and Co (YG6) substrate. The microstructure and morphology of the films were investigated by scanning electron micros-copy, atomic force microscopy and Raman spectroscopy. Their mechanical and tribological properties were studied by a WS-2005 scratch tester, a Rockwell hardness tester and a ball-cratering tester. Results show that the films are smooth and dense. The surface roughness (Ra) of the films is around 5. 2 nm. The content of sp3 bonds of the film on SKD11 (ID/IG=0. 69) is higher than that on YG6 (ID/IG=1. 54). The bond strength of the film on SKD11 (17. 8 N) is lower than that on YG6 (39. 2 N). There are only mi-nute radial cracks on the film on YG6 while the film on SKD11 is peeled off after Rockwell hardness testing. The wear rate of the film on SKD11 (1. 40E-4) is higher than that on YG6 (8. 81E-5) as revealed by the ball-cratering tests.